An Introduction to Surface-Micromachining

An Introduction to Surface-Micromachining
Author : Robert W. Johnstone
Publisher : Springer Science & Business Media
Total Pages : 210
Release : 2004-06-03
ISBN 10 : 1402080204
ISBN 13 : 9781402080203
Language : EN, FR, DE, ES & NL

An Introduction to Surface-Micromachining
Language: en
Pages: 210
Authors: Robert W. Johnstone
Categories: Technology & Engineering
Type: BOOK - Published: 2004-06-03 - Publisher: Springer Science & Business Media

An Introduction to Surface-Micromachining provides for the first time a unified view of surface-micromachining. Building up from the basic building block of mic
Micromachining of Engineering Materials
Language: en
Pages: 416
Authors: J.A. McGeough
Categories: Technology & Engineering
Type: BOOK - Published: 2001-11-29 - Publisher: CRC Press

Explaining principles underlying the main micromachining practices currently being used and developed in industrial countries around the world, Micromachining o
Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication
Language: en
Pages: 692
Authors: P. Rai-Choudhury
Categories: Microfabrication
Type: BOOK - Published: 1997 - Publisher: IET

Volume 2 of the Handbook focuses on the process technology and the numerous device applications using Micromachining and microfabrication. Ths handbook will be
Silicon Micromachining
Language: en
Pages: 420
Authors: M. Elwenspoek
Categories: Technology & Engineering
Type: BOOK - Published: 2004-08-19 - Publisher: Cambridge University Press

A comprehensive overview of the key techniques used in the fabrication of micron-scale structures in silicon; for graduate students and researchers.
Non-traditional Micromachining Processes
Language: en
Pages: 422
Authors: Golam Kibria
Categories: Technology & Engineering
Type: BOOK - Published: 2017-03-07 - Publisher: Springer

This book presents a complete coverage of micromachining processes from their basic material removal phenomena to past and recent research carried by a number o
Accuracy Enhancement Technologies for Micromachining Processes
Language: en
Pages: 214
Authors: Golam Kibria
Categories: Technology & Engineering
Type: BOOK - Published: 2020-02-20 - Publisher: Springer Nature

This book bridges the gap between the demand for micro-featured components on the one hand, and successful micromachining of miniature products on the other. In
Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology
Language: en
Pages: 296
Authors: Bijoy Bhattacharyya
Categories: Science
Type: BOOK - Published: 2015-04-10 - Publisher: William Andrew

Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology is the first book solely dedicated to electrochemical micromachining (EMM). It begin
Micromachining Techniques for Fabrication of Micro and Nano Structures
Language: en
Pages: 314
Authors: Mojtaba Kahrizi
Categories: Science
Type: BOOK - Published: 2012-02-03 - Publisher: BoD – Books on Demand

Micromachining is used to fabricate three-dimensional microstructures and it is the foundation of a technology called Micro-Electro-Mechanical-Systems (MEMS). B
Silicon Wet Bulk Micromachining for MEMS
Language: en
Pages: 412
Authors: Prem Pal
Categories: Science
Type: BOOK - Published: 2017-04-07 - Publisher: CRC Press

Microelectromechanical systems (MEMS)-based sensors and actuators have become remarkably popular in the past few decades. Rapid advances have taken place in ter
Hybrid Micro-Machining Processes
Language: en
Pages: 70
Authors: Sumit Bhowmik
Categories: Technology & Engineering
Type: BOOK - Published: 2019-02-09 - Publisher: Springer

This book presents some of the recent hybrid micro-machining processes used to manufacture miniaturized products with micro level precision. The current develop